Atomic layer processing : semiconductor dry etching technology / Thorsten Lill.
Material type: Computer filePublication details: Weinheim, Germany : Wiley-VCH, 2021.Description: 1 online resourceISBN:- 9783527824199
- 3527824197
- 9783527824182
- 3527824189
- 621.3815/2 23
Item type | Home library | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|
e-Book | S. R. Ranganathan Learning Hub Online | 621.3815/2 (Browse shelf(Opens below)) | Available | EB1202 |
Total holds: 0
Includes bibliographical references and index.
Wiley Frontlist Obook All English 2021
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