Atomic layer processing : (Record no. 13855)
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000 -LEADER | |
---|---|
fixed length control field | 00932nmm a2200253Ii 4500 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20230705152726.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 210504s2021 gw ob 001 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9783527824199 |
Qualifying information | (electronic bk.) |
International Standard Book Number | 3527824197 |
Qualifying information | (electronic bk.) |
Canceled/invalid ISBN | 9783527346684 |
International Standard Book Number | 9783527824182 |
Qualifying information | (electronic bk.) |
International Standard Book Number | 3527824189 |
Qualifying information | (electronic bk.) |
Canceled/invalid ISBN | 3527346686 |
024 7# - OTHER STANDARD IDENTIFIER | |
Standard number or code | 10.1002/9783527824199 |
Source of number or code | doi |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815/2 |
Edition number | 23 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Lill, Thorsten, |
Relator term | author. |
9 (RLIN) | 22265 |
245 ## - TITLE STATEMENT | |
Title | Atomic layer processing : |
Remainder of title | semiconductor dry etching technology / |
Statement of responsibility, etc. | Thorsten Lill. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Weinheim, Germany : |
Name of publisher, distributor, etc. | Wiley-VCH, |
Date of publication, distribution, etc. | 2021. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 1 online resource. |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc. note | Includes bibliographical references and index. |
590 ## - LOCAL NOTE (RLIN) | |
Provenance (VM) [OBSOLETE] | Wiley Frontlist Obook All English 2021 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Semiconductors |
General subdivision | Etching. |
9 (RLIN) | 22266 |
856 ## - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | <a href="https://doi.org/10.1002/9783527824199">https://doi.org/10.1002/9783527824199</a> |
Public note | Wiley Online Library |
Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Dewey Decimal Classification | S. R. Ranganathan Learning Hub | S. R. Ranganathan Learning Hub | Online | 05/07/2023 | Inforkart India Pvt. Ltd., New Delhi | 621.3815/2 | EB1202 | 05/07/2023 | 05/07/2023 | e-Book |