Atomic layer processing : (Record no. 13855)

MARC details
000 -LEADER
fixed length control field 00932nmm a2200253Ii 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20230705152726.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 210504s2021 gw ob 001 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783527824199
Qualifying information (electronic bk.)
International Standard Book Number 3527824197
Qualifying information (electronic bk.)
Canceled/invalid ISBN 9783527346684
International Standard Book Number 9783527824182
Qualifying information (electronic bk.)
International Standard Book Number 3527824189
Qualifying information (electronic bk.)
Canceled/invalid ISBN 3527346686
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1002/9783527824199
Source of number or code doi
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815/2
Edition number 23
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Lill, Thorsten,
Relator term author.
9 (RLIN) 22265
245 ## - TITLE STATEMENT
Title Atomic layer processing :
Remainder of title semiconductor dry etching technology /
Statement of responsibility, etc. Thorsten Lill.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Weinheim, Germany :
Name of publisher, distributor, etc. Wiley-VCH,
Date of publication, distribution, etc. 2021.
300 ## - PHYSICAL DESCRIPTION
Extent 1 online resource.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
590 ## - LOCAL NOTE (RLIN)
Provenance (VM) [OBSOLETE] Wiley Frontlist Obook All English 2021
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
General subdivision Etching.
9 (RLIN) 22266
856 ## - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1002/9783527824199">https://doi.org/10.1002/9783527824199</a>
Public note Wiley Online Library
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
    Dewey Decimal Classification     S. R. Ranganathan Learning Hub S. R. Ranganathan Learning Hub Online 05/07/2023 Inforkart India Pvt. Ltd., New Delhi   621.3815/2 EB1202 05/07/2023 05/07/2023 e-Book