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Atomic layer processing : semiconductor dry etching technology /

Lill, Thorsten,

Atomic layer processing : semiconductor dry etching technology / Thorsten Lill. - Weinheim, Germany : Wiley-VCH, 2021. - 1 online resource.

Includes bibliographical references and index.

ISBN: 9783527824199 3527824197 9783527824182 3527824189

Standard No.: 10.1002/9783527824199 doi

Subjects--Topical Terms:
Semiconductors--Etching.

Dewey Class. No.: 621.3815/2

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