Atomic layer processing : semiconductor dry etching technology / Thorsten Lill.

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Computer filePublication details: Weinheim, Germany : Wiley-VCH, 2021.Description: 1 online resourceISBN:

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Item type	Home library	Call number	Status	Date due	Barcode	Item holds
e-Book	S. R. Ranganathan Learning Hub Online	621.3815/2 (Browse shelf(Opens below))	Available		EB1202

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Includes bibliographical references and index.

Wiley Frontlist Obook All English 2021

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