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An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf and Kirt Williams.

By: Contributor(s): Material type: TextTextSeries: Microelectromechanical systems seriesPublication details: Boston; Artech House Inc.; 2004.Edition: 2nd edDescription: xx, 283 p. ill. 26 cmISBN:
  • 9781580535908
Subject(s): DDC classification:
  • 621.381 M299I
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