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An Introduction to Microelectromechanical Systems Engineering

Maluf, Nadim.

An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf and Kirt Williams. - 2nd ed. - Boston; Artech House Inc.; 2004. - xx, 283 p. ill. 26 cm. - Microelectromechanical systems series .

Includes bibliographical references and index.

ISBN: 9781580535908

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 621.381 / M299I

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