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Fundamentals of Microfabrication and Nanotechnology by Marc J. Madou.

By: Material type: TextTextPublication details: Boca Raton, FL CRC Press c2012.Edition: 3rd edDescription: 3 v. ill. (some col.) 29 cmISBN:
  • 9781420055115 (v. 1
  • 1420055119 (v. 1
  • 9781420055191 (v. 2
  • 1420055194 (v. 2
  • 9781420055160 (v. 3
  • 142005516X (v. 3
Subject(s): DDC classification:
  • 620.5 M266F
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