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Fundamentals of Microfabrication and Nanotechnology

Madou, Marc J.

Fundamentals of Microfabrication and Nanotechnology by Marc J. Madou. - 3rd ed. - Boca Raton, FL CRC Press c2012. - 3 v. ill. (some col.) 29 cm.

Includes bibliographical references and index.

ISBN: 9781420055115 (v. 1 1420055119 (v. 1 9781420055191 (v. 2 1420055194 (v. 2 9781420055160 (v. 3 142005516X (v. 3

Subjects--Topical Terms:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.

Dewey Class. No.: 620.5 / M266F

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