| 000 | 00859nmm a2200229Ki 4500 | ||
|---|---|---|---|
| 005 | 20230705152726.0 | ||
| 008 | 210119s2014 enk o 000 0 eng d | ||
| 020 |
_a9781118696224 _q(electronic bk.) |
||
| 020 |
_a1118696220 _q(electronic bk.) |
||
| 020 | _z9780470061213 | ||
| 020 | _z0470061219 | ||
| 082 |
_a621.38152 _223 |
||
| 100 |
_aCao, Imin, _eauthor. _922234 |
||
| 245 |
_aWafer manufacturing : _bshaping of single crystal silicon wafers / _cby Imin Cao, Milind Bhagavat. |
||
| 260 |
_aChichester : _bWiley-Blackwell, _c2014. |
||
| 300 | _a1 online resource. | ||
| 590 | _bWiley Frontlist Obook All English 2021 | ||
| 650 |
_aSemiconductor wafers. _922235 |
||
| 650 |
_aSemiconductor wafers. _2fast _0(OCoLC)fst01112189 _922235 |
||
| 700 |
_aBhagavat, Milind, _eauthor. _922236 |
||
| 856 |
_uhttps://doi.org/10.1002/9781118696224 _zWiley Online Library |
||
| 999 |
_c13847 _d13847 |
||