000 04152nmm a22004095i 4500
005 20230705150629.0
008 100301s2008 xxk| s |||| 0|eng d
020 _a9781848000216
_9978-1-84800-021-6
082 _a629.8312
_223
082 _a003
_223
100 _aTan, Kok Kiong.
_0(orcid)0000-0002-4245-070X
_1https://orcid.org/0000-0002-4245-070X
_920001
245 _aPrecision Motion Control
_h[electronic resource] :
_bDesign and Implementation /
_cby Kok Kiong Tan, Tong Heng Lee, Sunan Huang.
250 _a2nd ed. 2008.
260 _aLondon :
_bSpringer London :
_bImprint: Springer,
_c2008.
300 _aXVI, 272 p. 224 illus.
_bonline resource.
505 _aPrecision Tracking Motion Control -- Automatic Tuning of Control Parameters -- Co-ordinated Motion Control of Gantry Systems -- Geometrical Error Compensation -- Electronic Interpolation Errors -- Vibration Monitoring and Control -- Other Engineering Aspects.
520 _aApplications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes. Precision Motion Control (second edition) focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system. The second edition has been extensively edited and rewritten throughout with the following particular areas being expanded or added: • piezoelectric actuators; • fine movement control; • gantry-stage control; • interpolation of quadrature encoder signals; • geometrical error modelling for single-, dual- and general-XY-axis stages. By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter is provided in a manner that is accessible to a broad base of readers, ranging from academics to practitioners. Praise for the first edition: ...a refreshing and much needed addition to the field of precision engineering... well written, readable, and concise yet comprehensive. International Journal of Robust and Nonlinear Control ...an excellent single source of essential topics related to precision motion control. Applied Mechanics Reviews Advances in Industrial Control aims to report and encourage the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.
650 _aControl engineering.
_920002
650 _aNanotechnology.
_920003
650 _aManufactures.
_920004
650 _aRobotics.
_920005
650 _aAutomation.
_920006
650 _aMultibody systems.
_920007
650 _aVibration.
_920008
650 _aMechanics, Applied.
_920009
650 _aElectronics.
_920010
650 _aControl and Systems Theory.
_920011
650 _aNanotechnology.
_920003
650 _aMachines, Tools, Processes.
_920012
650 _aControl, Robotics, Automation.
_920013
650 _aMultibody Systems and Mechanical Vibrations.
_920014
650 _aElectronics and Microelectronics, Instrumentation.
_920015
700 _aLee, Tong Heng.
_eauthor.
_0(orcid)0000-0002-2785-516X
_1https://orcid.org/0000-0002-2785-516X
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
_920016
700 _aHuang, Sunan.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
_920017
856 _uhttps://doi.org/10.1007/978-1-84800-021-6
942 _cEBK
999 _c13593
_d13593