000			01963nmm a2200193Ia 4500
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020			_a9781315274164
082			_a620.5 _bM266F
100			_aMadou, Marc J. _eAuthor _lEnglish _92784
245		0	_aFundamentals of Microfabrication and Nanotechnology _c/ by Marc J. Madou. _h[Electronic Resource]
250			_a3rd Ed.
260			_aBoca Raton _b: Taylor & Francis, _c2012
300			_a1992p.
520			_aNow in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
650			_aEngineering and Technology _916023
650			_aPhysical Sciences _916024
856			_uhttps://doi.org/10.1201/9781315274164 _qPDF _yClick to Access the Online Book
942			_cEBK _nYes
999			_c12559 _d12559