000			01654nmm a2200193Ia 4500
008			220920s9999||||xx |||||||||||||| ||und||
020			_a9781139032605
082			_a621.381 _bJ71E
100			_aJones, T. _eAuthor _lEnglish _92209
245		0	_aElectromechanics and MEMS _c/ by T. Jones and N. Nenadic. _h[Electronic Resource]
260			_aCambridge _b: Cambridge University Press, _c2013
300			_axx, 559p.
520			_aOffering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.
650			_aEngineering _9406
650			_aNanotechnology _9688
700			_aNenadic, N. _i[Author] _92210
856			_uhttps://doi.org/10.1017/CBO9781139032605 _qPDF _yClick to Access the Online Book
942			_cEBK _nYes
999			_c12377 _d12377