000			01321nmm a2200181Ia 4500
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020			_a9780511781995
082			_a621.381 _bL963A
100			_aLucyszyn, S. _eEditor _lEnglish _92201
245		0	_aAdvanced RF MEMS _c/ edited by S. Lucyszyn. _h[Electronic Resource]
260			_aCambridge _b: Cambridge University Press, _c2010
300			_axxviii, 412p.
520			_aAn up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. Reviews RF MEMS technologies Illustrates new techniques that solve long-standing problems associated with reliability and packaging Provides the information needed to incorporate RF MEMS into commercial products Describes current and future trends in RF MEMS, providing perspective on industry growth Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
650			_aEngineering _9406
650			_aNanotechnology _9688
856			_uhttps://doi.org/10.1017/CBO9780511781995 _qPDF _yClick to Access the Online Book
942			_cEBK _nYes
999			_c12373 _d12373