| 000 | 00467nam#a2200145ua#4500 | ||
|---|---|---|---|
| 008 | 021002s2005 enka 001 0 eng | ||
| 020 | _a9780444516169 | ||
| 082 |
_a621.381 _bB228A |
||
| 100 |
_aBao, Minhang _911769 |
||
| 245 |
_aAnalysis and Design Principles of MEMS Devices _cby Minhang Bao. |
||
| 260 |
_bElsevier Science; _aNew York _c2005. |
||
| 300 | _axiii, 312p. | ||
| 650 |
_aMicroelectromechanical systems; _911770 |
||
| 653 | _aMicroelectromechanical systems; | ||
| 999 |
_c10390 _d10390 |
||