| 000 | 00581nam#a2200193ua#4500 | ||
|---|---|---|---|
| 008 | 191014 2001 | ||
| 020 | _a9781475774580 | ||
| 082 |
_a621.381 _bSe59M |
||
| 100 |
_aSenturia, Stephen D. _911611 |
||
| 245 |
_aMicrosystem Design _cby Stephen D. Senturia. |
||
| 260 |
_bSpringer _aBerlin _c2001 |
||
| 300 | _axxvi, 689p. | ||
| 650 |
_aMicroelectronics _911612 |
||
| 650 |
_aMicroelectromechanical systems _911613 |
||
| 650 |
_aSystem Design _911614 |
||
| 653 | _aMicroelectronics | ||
| 653 | _aMicroelectromechanical systems | ||
| 653 | _aSystem Design | ||
| 999 |
_c10354 _d10354 |
||