| 000 | 00653nam#a2200181ua#4500 | ||
|---|---|---|---|
| 008 | 040514s2004 maua b 001 0 eng | ||
| 020 | _a9781580535908 | ||
| 082 |
_a621.381 _bM299I |
||
| 100 |
_aMaluf, Nadim. _911586 |
||
| 245 |
_aAn Introduction to Microelectromechanical Systems Engineering _cby Nadim Maluf and Kirt Williams. |
||
| 250 | _a2nd ed. | ||
| 260 |
_aBoston; _bArtech House Inc.; _c2004. |
||
| 300 |
_axx, 283 p. _bill. _c26 cm. |
||
| 440 |
_aMicroelectromechanical systems series _911587 |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 |
_aMicroelectromechanical systems. _911588 |
||
| 700 |
_aWilliams, Kirt. _911589 |
||
| 999 |
_c10347 _d10347 |
||