| 000 | 00844nam#a2200253ua#4500 | ||
|---|---|---|---|
| 008 | 110519s2012 flua b 001 0 eng | ||
| 020 | _a9781420055115 (v. 1 | ||
| 020 | _a1420055119 (v. 1 | ||
| 020 | _a9781420055191 (v. 2 | ||
| 020 | _a1420055194 (v. 2 | ||
| 020 | _a9781420055160 (v. 3 | ||
| 020 | _a142005516X (v. 3 | ||
| 082 |
_a620.5 _bM266F |
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| 100 |
_aMadou, Marc J. _911413 |
||
| 245 |
_aFundamentals of Microfabrication and Nanotechnology _cby Marc J. Madou. |
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| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton, FL _bCRC Press _cc2012. |
||
| 300 |
_a3 v. _bill. (some col.) _c29 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 |
_aMicroelectromechanical systems. _911414 |
||
| 650 |
_aNanoelectromechanical systems. _911415 |
||
| 650 |
_aMicrofluidics. _911416 |
||
| 650 |
_aSolid state physics. _911417 |
||
| 999 |
_c10299 _d10299 |
||