000 | 00844nam#a2200253ua#4500 | ||
---|---|---|---|
008 | 110519s2012 flua b 001 0 eng | ||
020 | _a9781420055115 (v. 1 | ||
020 | _a1420055119 (v. 1 | ||
020 | _a9781420055191 (v. 2 | ||
020 | _a1420055194 (v. 2 | ||
020 | _a9781420055160 (v. 3 | ||
020 | _a142005516X (v. 3 | ||
082 |
_a620.5 _bM266F |
||
100 |
_aMadou, Marc J. _911413 |
||
245 |
_aFundamentals of Microfabrication and Nanotechnology _cby Marc J. Madou. |
||
250 | _a3rd ed. | ||
260 |
_aBoca Raton, FL _bCRC Press _cc2012. |
||
300 |
_a3 v. _bill. (some col.) _c29 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
650 |
_aMicroelectromechanical systems. _911414 |
||
650 |
_aNanoelectromechanical systems. _911415 |
||
650 |
_aMicrofluidics. _911416 |
||
650 |
_aSolid state physics. _911417 |
||
999 |
_c10299 _d10299 |