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	1.	Silicon Wet Bulk Micromachining for MEMS by Prem Pal, Kazuo Sato by Pal, Prem Sato, Kazuo Material type: Text; Format: print Publication details: Singapore Pan Stanford/ CRC Press 2017 Online resources: Publisher's Website Availability: Items available for loan: S. R. Ranganathan Learning Hub (1)Call number: 621.381 P17S. Log in to add tags
	2.	Enabling Technologies for MEMS and Nanodevices Advanced micro and nanosystems Edited by Henry Baltes and others by Baltes, Henry [Editor] Brand, Oliver [Editor] Fedder, Gary k [Editor] Hierold, Christofer [Editor] Korvink, Jan G [Editor] Tabada, Osamu [Editor] Series: Advanced micro and Nanosystems 1 Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: New York Wiley-VCH 2013 Availability: Items available for loan: S. R. Ranganathan Learning Hub (3)Call number: 620.5 B217E, ... Log in to add tags
	3.	No cover image available Fundamentals of Microfabrication and Nanotechnology by Marc J. Madou. by Madou, Marc J Edition: 3rd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton, FL CRC Press c2012 Availability: Items available for loan: S. R. Ranganathan Learning Hub (6)Call number: 620.5 M266F, ... Log in to add tags
	4.	MEMS and Microsystems Design and manufacture Tai-Ran Hsu. by Hsu, Tai-Ran Material type: Text; Format: print ; Literary form: Not fiction Publication details: Chennai McGraw-Hill c2002 Online resources: Publisher description Table of contents Availability: Items available for loan: S. R. Ranganathan Learning Hub (3)Call number: 621.381 H859M, ... Items available for reference: S. R. Ranganathan Learning Hub: Not For Loan (1)Call number: 621.381 H859M. Not available: S. R. Ranganathan Learning Hub: Checked out (2). Log in to add tags
	5.	Foundations of MEMS by Chang Liu. by Liu, Chang Ph.D Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: New Delhi Pearson Education; c2012 Availability: Items available for loan: S. R. Ranganathan Learning Hub (2)Call number: 621.381 L74F, ... Log in to add tags
	6.	An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf and Kirt Williams. by Maluf, Nadim Williams, Kirt Series: Microelectromechanical systems series Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boston; Artech House Inc.; 2004 Availability: Items available for loan: S. R. Ranganathan Learning Hub (1)Call number: 621.381 M299I. Log in to add tags
	7.	Microsystem Design by Stephen D. Senturia. by Senturia, Stephen D Material type: Text; Format: print Publication details: Berlin Springer 2001 Availability: Items available for loan: S. R. Ranganathan Learning Hub (2)Call number: 621.381 Se59M, ... Log in to add tags
	8.	Analysis and Design Principles of MEMS Devices by Minhang Bao. by Bao, Minhang Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York Elsevier Science; 2005 Availability: Items available for loan: S. R. Ranganathan Learning Hub (1)Call number: 621.381 B228A. Not available: S. R. Ranganathan Learning Hub: Checked out (1). Log in to add tags
	9.	Fundamentals and Applications of Microfluidics by Nam-Trung Nguyen, Steven Wereley, and Seyed Ali Mousavi Shaegh. by Nguyen, Nam-Trung [author.] Wereley, Steven T [author.] Shaegh, Seyed Ali Mousavi [author.] Series: Artech House integrated microsystems series \| Artech House integrated microsystems series Edition: 3rd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Norwood, Massachusetts Artech House 2019 Availability: Items available for loan: S. R. Ranganathan Learning Hub (2)Call number: 620.106 N499F, ... Log in to add tags