TY  - BOOK
AU  - Pal, Prem
AU  - Sato, Kazuo
TI  - Silicon Wet Bulk Micromachining for MEMS
SN  - 9789814613729
U1  - 621.381 
PY  - 2017///
CY  - Singapore
PB  - Pan Stanford/ CRC Press
KW  - Microelectromechanical systems (MEMS)
KW  - Silicon -- Electric properties
UR  - https://www.crcpress.com/Silicon-Wet-Bulk-Micromachining-for-MEMS/Pal-Sato/p/book/9789814613729
ER  -