TY  - DATA
AU  - Lill, Thorsten,
TI  - Atomic layer processing: semiconductor dry etching technology 
SN  - 9783527824199
U1  - 621.3815/2 23
PY  - 2021///
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Semiconductors
KW  - Etching
N1  - Includes bibliographical references and index
UR  - https://doi.org/10.1002/9783527824199
ER  -