TY  - DATA
AU  - Matsumura, H.
TI  - Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD 
SN  - 9783527818662
U1  - 660.2995 23
PY  - 2019///]
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Catalysts
KW  - Chemical vapor deposition
KW  - SCIENCE
KW  - Chemistry
KW  - Industrial & Technical
KW  - bisacsh
KW  - TECHNOLOGY & ENGINEERING
KW  - Chemical & Biochemical
KW  - fast
N1  - Includes bibliographical references and index
N2  - The authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field'including the father of catalytic chemical vapor deposition'it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications.-Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) -Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles -Presents comparisons of different Cat-CVD methods which are usually not found in research papers -Bridges academic and industrial research'showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies
UR  - https://doi.org/10.1002/9783527818655
ER  -