TY  - DATA
AU  - Lucyszyn, S.
TI  - Advanced RF MEMS
SN  - 9780511781995
U1  - 621.381 
PY  - 2010///
CY  - Cambridge
PB  - : Cambridge University Press
KW  - Engineering
KW  - Nanotechnology
N2  - An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. Reviews RF MEMS technologies Illustrates new techniques that solve long-standing problems associated with reliability and packaging Provides the information needed to incorporate RF MEMS into commercial products Describes current and future trends in RF MEMS, providing perspective on industry growth Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
UR  - https://doi.org/10.1017/CBO9780511781995
ER  -