TY  - BOOK
AU  - Bao, Minhang
TI  - Analysis and Design Principles of MEMS Devices
SN  - 9780444516169
U1  - 621.381 
PY  - 2005///
CY  - New York
PB  - Elsevier Science
KW  - Microelectromechanical systems
ER  -