TY  - BOOK
AU  - Senturia, Stephen D.
TI  - Microsystem Design
SN  - 9781475774580
U1  - 621.381 
PY  - 2001///
CY  - Berlin
PB  - Springer
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - System Design
ER  -