TY  - BOOK
AU  - Maluf, Nadim.
AU  - Williams, Kirt.
TI  - An Introduction to Microelectromechanical Systems Engineering
SN  - 9781580535908
U1  - 621.381 
PY  - 2004///
CY  - Boston
PB  - Artech House Inc.
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -