TY  - BOOK
AU  - Liu, Chang
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.381 
PY  - 2012///
CY  - New Delhi
PB  - Pearson Education
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -