TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of Microfabrication and Nanotechnology
SN  - 9781420055115 (v. 1
U1  - 620.5 
PY  - 2012///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid state physics
N1  - Includes bibliographical references and index
ER  -