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Enabling Technologies for MEMS and Nanodevices Advanced micro and nanosystems Edited by Henry Baltes and others

By: Contributor(s): Material type: TextTextSeries: Advanced micro and Nanosystems 1Publication details: Wiley-VCH New York 2013Description: xii, 427p; illISBN:
  • 9783527334988
Subject(s): DDC classification:
  • 620.5 B217E
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