MARC details
| 000 -LEADER |
|---|
| fixed length control field |
03327nmm a2200373Ii 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20230705152723.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
190211s2019 gw ob 001 0 eng d |
| 015 ## - NATIONAL BIBLIOGRAPHY NUMBER |
|---|
| National bibliography number |
GBB935205 |
| Source |
bnb |
| 016 7# - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER |
|---|
| Record control number |
019253713 |
| Source |
Uk |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783527818662 |
| Qualifying information |
(electronic bk.) |
|
|---|
| International Standard Book Number |
3527818669 |
| Qualifying information |
(electronic bk.) |
|
|---|
| International Standard Book Number |
9783527818655 |
| Qualifying information |
(electronic bk. ; |
| -- |
oBook) |
|
|---|
| International Standard Book Number |
3527818650 |
| Qualifying information |
(electronic bk. ; |
| -- |
oBook) |
|
|---|
| International Standard Book Number |
352734523X |
|
|---|
| International Standard Book Number |
9783527345236 |
|
|---|
| Canceled/invalid ISBN |
9783527345236 |
| 037 ## - SOURCE OF ACQUISITION |
|---|
| Stock number |
9783527818662 |
| Source of stock number/acquisition |
Wiley |
| 072 #7 - SUBJECT CATEGORY CODE |
|---|
| Subject category code |
SCI |
| Subject category code subdivision |
013060 |
| Source |
bisacsh |
|
|---|
| Subject category code |
TEC |
| Subject category code subdivision |
009010 |
| Source |
bisacsh |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
660.2995 |
| Edition number |
23 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Matsumura, H. |
| Fuller form of name |
(Hideki), |
| Relator term |
author. |
| 9 (RLIN) |
22104 |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Catalytic Chemical Vapor Deposition : |
| Remainder of title |
Technology and Applications of Cat-CVD / |
| Statement of responsibility, etc. |
Hideki Matsumura and 3 others. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Weinheim, Germany : |
| Name of publisher, distributor, etc. |
Wiley-VCH, |
| Date of publication, distribution, etc. |
[2019] |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
1 online resource |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
The authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field'including the father of catalytic chemical vapor deposition'it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications.-Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) -Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles -Presents comparisons of different Cat-CVD methods which are usually not found in research papers -Bridges academic and industrial research'showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Catalysts. |
| 9 (RLIN) |
22105 |
|
|---|
| Topical term or geographic name entry element |
Chemical vapor deposition. |
| 9 (RLIN) |
22106 |
|
|---|
| Topical term or geographic name entry element |
SCIENCE |
| General subdivision |
Chemistry |
| -- |
Industrial & Technical. |
| Source of heading or term |
bisacsh |
| 9 (RLIN) |
22107 |
|
|---|
| Topical term or geographic name entry element |
TECHNOLOGY & ENGINEERING |
| General subdivision |
Chemical & Biochemical. |
| Source of heading or term |
bisacsh |
| 9 (RLIN) |
22108 |
|
|---|
| Topical term or geographic name entry element |
Catalysts. |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst00848875 |
| 9 (RLIN) |
22105 |
|
|---|
| Topical term or geographic name entry element |
Chemical vapor deposition. |
| Source of heading or term |
fast |
| Authority record control number or standard number |
(OCoLC)fst00853229 |
| 9 (RLIN) |
22106 |
| 856 ## - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://doi.org/10.1002/9783527818655">https://doi.org/10.1002/9783527818655</a> |
| Public note |
Wiley Online Library |
