Fundamentals of Microfabrication and Nanotechnology (Record no. 12559)
[ view plain ]
000 -LEADER | |
---|---|
fixed length control field | 01963nmm a2200193Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 220920s9999||||xx |||||||||||||| ||und|| |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9781315274164 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 620.5 |
Item number | M266F |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Madou, Marc J. |
Relator term | Author |
Language of a work | English |
9 (RLIN) | 2784 |
245 #0 - TITLE STATEMENT | |
Title | Fundamentals of Microfabrication and Nanotechnology |
Statement of responsibility, etc. | / by Marc J. Madou. |
Medium | [Electronic Resource] |
250 ## - EDITION STATEMENT | |
Edition statement | 3rd Ed. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Boca Raton |
Name of publisher, distributor, etc. | : Taylor & Francis, |
Date of publication, distribution, etc. | 2012 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 1992p. |
520 ## - SUMMARY, ETC. | |
Summary, etc. | Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work. |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Engineering and Technology |
9 (RLIN) | 16023 |
Topical term or geographic name entry element | Physical Sciences |
9 (RLIN) | 16024 |
856 ## - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | <a href="https://doi.org/10.1201/9781315274164">https://doi.org/10.1201/9781315274164</a> |
Electronic format type | |
Link text | Click to Access the Online Book |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | e-Book |
Suppress in OPAC |
Withdrawn status | Lost status | Damaged status | Use restrictions | Not for loan | Collection | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type | Public note |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
e-Book For Access | Textbook | S. R. Ranganathan Learning Hub | S. R. Ranganathan Learning Hub | Online | 2022-09-20 | Infokart India Pvt. Ltd., New Delhi | 576.00 | 620.5 M266F | EB0699 | 2022-09-20 | 2022-09-20 | e-Book | Platform : Taylor & Francis |