Fundamentals of Microfabrication and Nanotechnology (Record no. 12559)

MARC details
000 -LEADER
fixed length control field 01963nmm a2200193Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
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020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781315274164
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 620.5
Item number M266F
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Madou, Marc J.
Relator term Author
Language of a work English
9 (RLIN) 2784
245 #0 - TITLE STATEMENT
Title Fundamentals of Microfabrication and Nanotechnology
Statement of responsibility, etc. / by Marc J. Madou.
Medium [Electronic Resource]
250 ## - EDITION STATEMENT
Edition statement 3rd Ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Boca Raton
Name of publisher, distributor, etc. : Taylor & Francis,
Date of publication, distribution, etc. 2012
300 ## - PHYSICAL DESCRIPTION
Extent 1992p.
520 ## - SUMMARY, ETC.
Summary, etc. Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Engineering and Technology
9 (RLIN) 16023
Topical term or geographic name entry element Physical Sciences
9 (RLIN) 16024
856 ## - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1201/9781315274164">https://doi.org/10.1201/9781315274164</a>
Electronic format type PDF
Link text Click to Access the Online Book
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type e-Book
Suppress in OPAC
Holdings
Withdrawn status Lost status Damaged status Use restrictions Not for loan Collection Home library Current library Shelving location Date acquired Source of acquisition Cost, normal purchase price Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type Public note
      e-Book For Access   Textbook S. R. Ranganathan Learning Hub S. R. Ranganathan Learning Hub Online 2022-09-20 Infokart India Pvt. Ltd., New Delhi 576.00   620.5 M266F EB0699 2022-09-20 2022-09-20 e-Book Platform : Taylor & Francis