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Wafer manufacturing : shaping of single crystal silicon wafers /

Cao, Imin,

Wafer manufacturing : shaping of single crystal silicon wafers / by Imin Cao, Milind Bhagavat. - Chichester : Wiley-Blackwell, 2014. - 1 online resource.

ISBN: 9781118696224 1118696220

Subjects--Topical Terms:
Semiconductor wafers.
Semiconductor wafers.

Dewey Class. No.: 621.38152

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