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Analysis and Design Principles of MEMS Devices

Bao, Minhang

Analysis and Design Principles of MEMS Devices by Minhang Bao. - New York Elsevier Science; 2005. - xiii, 312p.

ISBN: 9780444516169

Subjects--Topical Terms:
Microelectromechanical systems;

Subjects--Index Terms: Microelectromechanical systems;

Dewey Class. No.: 621.381 / B228A

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