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Microsystem Design

Senturia, Stephen D.

Microsystem Design by Stephen D. Senturia. - Berlin Springer 2001 - xxvi, 689p.

ISBN: 9781475774580

Subjects--Topical Terms:
Microelectronics
Microelectromechanical systems
System Design

Subjects--Index Terms: Microelectronics Microelectromechanical systems System Design

Dewey Class. No.: 621.381 / Se59M

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