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Foundations of MEMS

Liu, Chang Ph.D.

Foundations of MEMS by Chang Liu. - 2nd ed. - New Delhi Pearson Education; c2012. - 574 p. ill. 24 cm.

Includes bibliographical references and index.

ISBN: 9788131764756

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 621.381 / L74F

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