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MEMS and Microsystems Design and manufacture

Hsu, Tai-Ran.

MEMS and Microsystems Design and manufacture Tai-Ran Hsu. - Chennai McGraw-Hill c2002. - xii, 436 p. ill. 24 cm.

Includes bibliographical references (p. 427-431) and index.

ISBN: 9780070487093

Subjects--Topical Terms:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

Dewey Class. No.: 621.381 / H859M

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